Inventor
Oleh Khodykin
Inventor
San Diego, CA, US
Overview
Patents· 24 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Gprimary
H05GX-ray technique30%
B82YSpecific uses or applications of nanostructures18%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices18%
G21KHandling of particles or ionising radiation not otherwise provided for10%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light8%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light6%
H05HPlasma technique6%
G02BOptical elements, systems or apparatus4%
H01JElectric discharge tubes or discharge lamps1%
PatentTitleYear
8,686,370'EUV light source components and methods for producing, using and refurbishing same'20148,461,560'LPP EUV light source drive laser system'20138,314,398'EUV light source components and methods for producing, using and refurbishing same'20128,035,092'Laser produced plasma EUV light source'20117,960,701'EUV light source components and methods for producing, using and refurbishing same'20117,928,417'LPP EUV light source drive laser system'20117,872,245'Systems and methods for target material delivery in a laser produced plasma EUV light source'20117,732,793'Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source'20107,671,349'Laser produced plasma EUV light source'20107,642,533'Extreme ultraviolet light source'20107,589,337'LPP EUV plasma source material target delivery system'20097,491,954'Drive laser delivery systems for EUV light source'20097,482,609'LPP EUV light source drive laser system'20097,465,946'Alternative fuels for EUV light source'20087,439,530'LPP EUV light source drive laser system'20087,402,825'LPP EUV drive laser input system'20087,378,673'Source material dispenser for EUV light source'20087,372,056'LPP EUV plasma source material target delivery system'20087,368,741'Extreme ultraviolet light source'20087,365,349'EUV light source collector lifetime improvements'20087,180,081'Discharge produced plasma EUV light source'20077,109,503'Systems for protecting internal components of an EUV light source from plasma-generated debris'20066,972,421'Extreme ultraviolet light source'20056,815,700'Plasma focus light source with improved pulse power system'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2014Patents assigned to CYMER INC (24)· patent assignee history
2004–2014Based in San Diego, CA, US· patent location history
2012–2013Patents assigned to BYKANOV ALEXANDER N (2)· patent assignee history
2012–2013Patents assigned to FOMENKOV IGOR V (2)· patent assignee history
2012–2013Patents assigned to KHODYKIN OLEH V (2)· patent assignee history
2012Patents assigned to BOWERING NORBERT R (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CYMER INC | 24 | 2004–2014 |
| BYKANOV ALEXANDER N | 2 | 2012–2013 |
| FOMENKOV IGOR V | 2 | 2012–2013 |
| KHODYKIN OLEH Vself | 2 | 2012–2013 |
| BOWERING NORBERT R | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Diego, California, US | 24 | 2004–2014 |