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Inventor

TOSHIO MIZUNO

Inventor
JP

Overview

3→
Patents
2023–2025
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing27%
H01LSemiconductor devices27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
B08BCleaning in general18%
PatentTitleYear
12,350,787Substrate processing apparatus202512,033,847Cleaning module, substrate processing apparatus including cleaning module, and cleaning method202411,731,240Substrate processing apparatus2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2025Patents assigned to EBARA CORP (3)· patent assignee history
2023–2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
EBARA CORP32023–2025
Locations
LocationPatentsSpan
JP32023–2025