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Inventor

Peter M. Kopalidis

Inventor
Fremont, CA, US

Overview

6→
Patents
2001–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 6 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps45%
G01NInvestigating or analysing materials by determining their chemical or physical properties18%
G01KMeasuring temperature9%
G01RMeasuring electric variables9%
H01LSemiconductor devices9%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h109%
PatentTitleYear
10,903,097In-situ wafer temperature measurement and control20219,852,887Ion source of an ion implanter20178,890,506'Apparatus and method for measuring ion beam current'20148,653,807'Apparatus and method for measuring ion beam current'20146,259,105'System and method for cleaning silicon-coated surfaces in an ion implanter'20016,221,169'System and method for cleaning contaminated surfaces in an ion implanter'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2021Patents assigned to AXCELIS TECH INC (3)· patent assignee history
2001Based in Arlington, MA, US· patent location history
2014–2017Patents assigned to ADVANCED ION BEAM TECH INC (3)· patent assignee history
2014Patents assigned to KOPALIDIS PETER M (2)· patent assignee history
2014Patents assigned to WAN ZHIMIN (2)· patent assignee history
2014–2017Based in Fremont, CA, US· patent location history
2021Based in Swampscott, MA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ADVANCED ION BEAM TECH INC32014–2017
AXCELIS TECH INC32001–2021
KOPALIDIS PETER Mself22014
WAN ZHIMIN22014
Locations
LocationPatentsSpan
Fremont, California, US32014–2017
Arlington, Massachusetts, US22001
Swampscott, Massachusetts, US12021