LexDanaLexDanabeta
Inventor

Kazuo Nakaya

Inventor
Toyama, JP

Overview

2→
Patents
2017–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
G06FElectric digital data processing17%
H01LSemiconductor devices17%
PatentTitleYear
11,060,190Substrate processing apparatus and control system20219,690,879'Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe'2017

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2017Patents assigned to HITACHI INT ELECTRIC INC (1)· patent assignee history
2017–2021Based in Toyama, JP· patent location history
2021Patents assigned to KOKUSAI ELECTRIC CORP (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI INT ELECTRIC INC12017
KOKUSAI ELECTRIC CORP12021
Locations
LocationPatentsSpan
Toyama, JP22017–2021