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Inventor

Yu-Sheng Shen

Inventor
Hsinchu, TW

Overview

3→
Patents
2000–2003
Patent span
Performing operations
Primary field (CPC B)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing75%
Y10TTechnical subjects covered by former us classification25%
PatentTitleYear
6,561,877'Apparatus and method for retaining moisture on a polishing pad'20036,221,199'Apparatus and method for removing an adhesive bonded pad'20016,068,544'Apparatus and method for calibrating a polishing head'2000

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2000–2003Patents assigned to TAIWAN SEMICONDUCTOR MFG (3)· patent assignee history
2000Based in Taipei, TW· patent location history
2001Based in Hou Lung Town, TW· patent location history
2003Based in Hsinchu, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG32000–2003
Locations
LocationPatentsSpan
Hsinchu, TW12003
Hou Lung Town, TW12001
Taipei, TW12000