Inventor
Maureen K. Petterson
Inventor
Salem, MA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices12%
H01JElectric discharge tubes or discharge lamps12%
A61BDiagnosis9%
A61NElectrotherapy9%
G21KHandling of particles or ionising radiation not otherwise provided for9%
C23CCoating metallic material6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
PatentTitleYear
11,053,580Techniques for selective deposition using angled ions202111,000,705Relativistic energy compensating cancer therapy apparatus and method of use thereof202110,898,732Multi-color charged particle detector apparatus and method of use thereof202110,665,433Extreme edge uniformity control202010,532,228Multi-color charged particle detector apparatus and method of use thereof202010,310,379Multiple patterning approach using ion implantation20199,885,957'Ion-assisted deposition and implantation of photoresist to improve line edge roughness'20189,735,013'Ion implantation for improved contact hole critical dimension uniformity'20179,659,784'Ion-assisted deposition and implantation of photoresist to improve line edge roughness'20179,520,290'Ion implantation for improved etch performance'20169,512,517'Multiple exposure treatment for processing a patterning feature'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2021Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (8)· patent assignee history
2016–2020Based in Salem, MA, US· patent location history
2020–2021Patents assigned to LEE W DAVIS (3)· patent assignee history
2020–2021Patents assigned to PETTERSON MAUREEN (3)· patent assignee history
2020–2021Based in Somerville, MA, US· patent location history
2021Based in Winston-Salem, NC, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 8 | 2016–2021 |
| LEE W DAVIS | 3 | 2020–2021 |
| PETTERSON MAUREENself | 3 | 2020–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Salem, Massachusetts, US | 7 | 2016–2020 |
| Somerville, Massachusetts, US | 3 | 2020–2021 |
| Winston-Salem, NC, US | 1 | 2021 |