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Inventor

Minoru Kogano

Inventor
Tokyo, JP

Overview

1→
Patents
2003
Patent span
Chemistry
Primary field (CPC C)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material50%
C30BSingle-crystal growth50%
PatentTitleYear
6,503,079'Substrate processing apparatus and method for manufacturing semiconductor device'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003Patents assigned to HITACHI INT ELECTRIC INC (1)· patent assignee history
2003Based in Tokyo, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI INT ELECTRIC INC12003
Locations
LocationPatentsSpan
Tokyo, JP12003