Inventor
HENRY YEE SHIAN TONG
Inventor
TW
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H05GX-ray technique33%
G01VGeophysics17%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light8%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light8%
PatentTitleYear
12,114,412Shock wave visualization for extreme ultraviolet plasma optimization202411,800,626Shock wave visualization for extreme ultraviolet plasma optimization202311,226,564EUV light source and apparatus for lithography202211,158,989Laser source device, extreme ultraviolet lithography device and method2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2024Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (4)· patent assignee history
2021–2024Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 4 | 2021–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 4 | 2021–2024 |