Inventor
Kenji Hashinoki
Inventor
Kyoto, JP
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1062%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests19%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
G05BControl or regulating systems in general5%
Y02PClimate change mitigation technologies in the production or processing of goods5%
PatentTitleYear
7,563,323'Substrate treating apparatus'20097,525,650'Substrate processing apparatus for performing photolithography'20097,497,912'Substrate processing apparatus'20097,317,961'Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus'20087,229,240'Substrate processing apparatus and substrate processing method'20077,128,481'Substrate processing apparatus for inspecting processing history data'20067,069,099'Method of transporting and processing substrates in substrate processing apparatus'20066,963,789'Substrate processing apparatus control system and substrate processing apparatus'20056,837,632'Substrate treating apparatus'20056,790,287'Substrate processing apparatus, substrate inspection method and substrate processing system'20046,790,286'Substrate processing apparatus'20045,687,085'Substrate processing apparatus and method'19975,668,733'Substrate processing apparatus and method'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2009Patents assigned to DAINIPPON SCREEN MFG (13)· patent assignee history
1997–2009Based in Kyoto, JP· patent location history
2006Based in Saitama-shi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| DAINIPPON SCREEN MFG | 13 | 1997–2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyoto, JP | 12 | 1997–2009 |
| Saitama-shi, JP | 1 | 2006 |