Inventor
MASANORI OKUNO
Inventor
JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
G05BControl or regulating systems in general16%
H01LSemiconductor devices13%
C23CCoating metallic material10%
F04BPositive-displacement machines for liquids6%
Y02PClimate change mitigation technologies in the production or processing of goods6%
B01DSeparation3%
B08BCleaning in general3%
F04CRotary-piston, or oscillating-piston, positive-displacement machines for liquids3%
F23GCremation furnaces3%
PatentTitleYear
12,371,782Method of manufacturing semiconductor device and non-transitory computer-readable recording medium202512,365,982Processing apparatus and exhaust system202512,341,000Substrate processing apparatus and recording medium202512,080,149Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium202411,966,210Substrate processing apparatus, device management controller, and recording medium202411,827,982Processing apparatus202311,236,743Substrate processing apparatus and recording medium202211,237,538Substrate processing apparatus, device management controller, and recording medium2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to KOKUSAI ELECTRIC CORP (8)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KOKUSAI ELECTRIC CORP | 8 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 8 | 2022–2025 |