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Inventor

Masafumi Urakawa

Inventor
Miyagi, JP

Overview

12→
Patents
2010–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 12 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps42%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
H01LSemiconductor devices19%
C09KMaterials for miscellaneous applications, not provided for elsewhere4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
PatentTitleYear
11,037,763Member and plasma processing apparatus202110,707,053Plasma processing method and plasma processing apparatus20209,870,898'Plasma processing method and plasma processing apparatus'20189,865,471'Etching method and etching apparatus'20189,653,316'Plasma processing method and plasma processing apparatus'20179,530,657'Method of processing substrate and substrate processing apparatus'20169,257,301'Method of etching silicon oxide film'20169,224,616'Etching method and plasma processing apparatus'20158,183,161'Method and system for dry etching a hafnium containing material'20128,038,835'Processing device, electrode, electrode plate, and processing method'20117,846,645'Method and system for reducing line edge roughness during pattern etching'20107,743,731'Reduced contaminant gas injection system and method of using'2010

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2010–2021Patents assigned to TOKYO ELECTRON LTD (12)· patent assignee history
2010–2012Based in Salem, MA, US· patent location history
2011Based in Nirasaki, JP· patent location history
2012Patents assigned to FERNANDEZ LUIS ISIDRO (1)· patent assignee history
2012Patents assigned to URAKAWA MASAFUMI (1)· patent assignee history
2015–2021Based in Miyagi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD122010–2021
FERNANDEZ LUIS ISIDRO12012
URAKAWA MASAFUMIself12012
Locations
LocationPatentsSpan
Miyagi, JP82015–2021
Salem, Massachusetts, US32010–2012
Nirasaki, JP12011