Inventor
TOMOATSU ISHIBASHI
Inventor
JP
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01LSemiconductor devices25%
B08BCleaning in general23%
B24BMachines, devices, or processes for grinding or polishing6%
B05BSpraying apparatus4%
B01DSeparation2%
B65DContainers for storage or transport of articles or materials, e.g. bags, barrels, bottles, boxes, cans, cartons, crates, drums, jars, tanks, hoppers, forwarding containers2%
F26BDrying solid materials or objects by removing liquid therefrom2%
G01HMeasurement of mechanical vibrations or ultrasonic, sonic or infrasonic waves2%
G01LMeasuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure2%
PatentTitleYear
12,485,516Substrate cleaning apparatus, polishing apparatus, buffing apparatus, substrate cleaning method, substrate processing apparatus, and machine learning apparatus202512,394,639Substrate drying device and substrate drying method202512,033,847Cleaning module, substrate processing apparatus including cleaning module, and cleaning method202411,837,477Washing device and washing method202311,817,311Substrate cleaning method and substrate cleaning apparatus202311,676,827Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus202311,660,643Substrate cleaning device and substrate cleaning method202311,642,704Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these202311,626,299Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatus202311,524,322Jig for attaching and detaching cleaning member202211,501,983Substrate cleaning member and substrate cleaning apparatus202211,424,138Substrate cleaning tool, substrate cleaning apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate cleaning tool202211,180,303Storage container of scrubbing member and package of same202111,164,758Washing device and washing method2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to EBARA CORP (14)· patent assignee history
2021–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 14 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 14 | 2021–2025 |