Inventor
Marinus Maria Johannes Van De Wal
Inventor
Oirschot, NL
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices63%
G05BControl or regulating systems in general13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
Y02PClimate change mitigation technologies in the production or processing of goods13%
PatentTitleYear
10,095,123Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program20189,715,182'Lithographic apparatus, substrate support system, device manufacturing method and control program'20179,383,659'Positioning system, lithographic apparatus and device manufacturing method'20169,141,004'Lithographic apparatus and method'20158,854,607'Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2018Patents assigned to ASML NETHERLANDS BV (5)· patent assignee history
2014–2015Patents assigned to VAN DE WAL MARINUS MARIA JOHANNES (2)· patent assignee history
2014–2018Based in Oirschot, NL· patent location history
2015Patents assigned to AANGENENT WILHELMUS HENRICUS THEODORUS MARIA (1)· patent assignee history
2015Patents assigned to AKKERMANS JOHANNES ANTONIUS GERARDUS (1)· patent assignee history
2015Patents assigned to BEERENS RUUD ANTONIUS CATHARINA MARIA (1)· patent assignee history
2015Based in Olrschot, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 5 | 2014–2018 |
| VAN DE WAL MARINUS MARIA JOHANNESself | 2 | 2014–2015 |
| AANGENENT WILHELMUS HENRICUS THEODORUS MARIA | 1 | 2015 |
| AKKERMANS JOHANNES ANTONIUS GERARDUS | 1 | 2015 |
| BEERENS RUUD ANTONIUS CATHARINA MARIA | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Oirschot, NL | 4 | 2014–2018 |
| Olrschot, NL | 1 | 2015 |