Inventor
Kiyohiko Toshikawa
Inventor
Miyazaki, JP
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1014%
B24BMachines, devices, or processes for grinding or polishing5%
C03CChemical composition of glasses, glazes or vitreous enamels5%
H01LSemiconductor devices5%
PatentTitleYear
10,892,165Semiconductor manufacturing device and method of polishing semiconductor substrate20217,381,275'Apparatus and method for manufacturing semiconductor'20087,267,848'Method of fabricating a protective film by use of vacuum ultraviolet rays'20077,122,486'Film forming method'20067,026,257'Method of manufacturing low dielectric film by a vacuum ultraviolet chemical vapor deposition'20066,926,933'Method of manufacturing water-repelling film'20056,656,854'Method of forming a low dielectric constant film with tetramethylcyclotetrasiloxane (TMCTS) and LPCVD technique'20036,627,560'Method of manufacturing semiconductor device'20036,624,094'Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atoms'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2008Patents assigned to OKI ELECTRIC IND CO LTD (8)· patent assignee history
2003–2021Based in Miyazaki, JP· patent location history
2021Patents assigned to LAPIS SEMICONDUCTOR CO LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| OKI ELECTRIC IND CO LTD | 8 | 2003–2008 |
| LAPIS SEMICONDUCTOR CO LTD | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Miyazaki, JP | 9 | 2003–2021 |