Inventor
Lokesh Subramany
Inventor
Clifton Park, NY, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H10DInorganic electric semiconductor devices15%
G01RMeasuring electric variables10%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
G01BMeasuring length, thickness or similar linear dimensions5%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
PatentTitleYear
10,121,711Planar metrology pad adjacent a set of fins of a fin field effect transistor device20189,281,249'Decoupling measurement of layer thicknesses of a plurality of layers of a circuit structure'20169,177,873'Systems and methods for fabricating semiconductor device structures'20159,129,905'Planar metrology pad adjacent a set of fins of a fin field effect transistor device'20159,121,890'Planar metrology pad adjacent a set of fins of a fin field effect transistor device'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2018Patents assigned to GLOBALFOUNDRIES INC (5)· patent assignee history
2015–2018Based in Clifton Park, NY, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GLOBALFOUNDRIES INC | 5 | 2015–2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Clifton Park, New York, US | 5 | 2015–2018 |