Inventor
Xuyen Pham
Inventor
Fremont, CA, US
Overview
Patents· 31 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing41%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
A61JContainers specially adapted for medical or pharmaceutical purposes7%
A61MDevices for introducing media into, or onto, the body7%
H01LSemiconductor devices7%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
B29CShaping or joining of plastics4%
B29LIndexing scheme associated with subclass b29c, relating to particular articles4%
G05DSystems for controlling or regulating non-electric variables4%
Y10TTechnical subjects covered by former us classification2%
PatentTitleYear
10,643,882Ceramic ring with a ladder structure202010,497,591Load lock chamber and the cluster tool system using the same201910,410,909Waffer pedestal and support structure thereof20198,783,305'Powder filling apparatus and methods for their use'2014RE042942'Powder filling apparatus and methods for their use'20117,228,645'Multi-zone shower head for drying single semiconductor substrate'20077,226,055'Substrate holding and spinning assembly and methods for making the same'20077,054,719'System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system'20067,040,954'Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing'20067,040,970'Apparatus and method for distributing a polishing fluid'20067,018,276'Air platen for leading edge and trailing edge control'20066,953,750'Methods and systems for controlling belt surface temperature and slurry temperature in linear chemical mechanical planarization'20056,949,016'Gimballed conditioning apparatus'20056,939,212'Porous material air bearing platen for chemical mechanical planarization'20056,896,586'Method and apparatus for heating polishing pad'20056,896,600'Liquid dispense manifold for chemical-mechanical polisher'20056,872,128'System, method and apparatus for applying liquid to a CMP polishing pad'20056,869,339'Polishing pad and method of manufacture'20056,821,195'Carrier head having location optimized vacuum holes'20046,806,100'Molded end point detection window for chemical mechanical planarization'20046,761,626'Air platen for leading edge and trailing edge control'20046,755,723'Polishing head assembly'20046,746,313'Polishing head assembly in an apparatus for chemical mechanical planarization'20046,732,017'System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system'20046,712,670'Method and apparatus for applying downward force on wafer during CMP'20046,569,004'Polishing pad and method of manufacture'20036,475,332'Interlocking chemical mechanical polishing system'20026,447,380'Polishing apparatus and substrate retainer ring providing continuous slurry distribution'20026,199,927'Robot blade for handling of semiconductor substrates'20016,182,712'Power filling apparatus and methods for their use'20016,024,393'Robot blade for handling of semiconductor substrate'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2001Patents assigned to APPLIED MATERIALS INC (2)· patent assignee history
2000–2014Based in Fremont, CA, US· patent location history
2002–2007Patents assigned to LAM RES CORP (21)· patent assignee history
2011–2014Patents assigned to NAYDO KYLE A (2)· patent assignee history
2011–2014Patents assigned to NOVARTIS AG (2)· patent assignee history
2019–2020Patents assigned to PIOTECH CO LTD (3)· patent assignee history
2019–2020Based in Shenyang, CN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 21 | 2002–2007 |
| PIOTECH CO LTD | 3 | 2019–2020 |
| APPLIED MATERIALS INC | 2 | 2000–2001 |
| NAYDO KYLE A | 2 | 2011–2014 |
| NOVARTIS AG | 2 | 2011–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 28 | 2000–2014 |
| Shenyang, CN | 3 | 2019–2020 |