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Inventor

Hirofumi Shibatya

Inventor
Yokohama, JP

Overview

1→
Patents
1989
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
4,804,600'Lithographic mask structure and process for preparing the same'1989

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1989Patents assigned to CANON KK (1)· patent assignee history
1989Based in Yokohama, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
CANON KK11989
Locations
LocationPatentsSpan
Yokohama, JP11989