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Inventor

Denise M. Puisto

Inventor
Milton, VT, US

Overview

3→
Patents
1995–2001
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps50%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
G05BControl or regulating systems in general25%
PatentTitleYear
6,177,680'Correction of pattern-dependent errors in a particle beam lithography system'20015,716,763'Liquid immersion heating process for substrate temperature uniformity'19985,424,548'Pattern specific calibration for E-beam lithography'1995

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1995–2001Patents assigned to IBM (3)· patent assignee history
1995–2001Based in Milton, VT, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
IBM31995–2001
Locations
LocationPatentsSpan
Milton, VT, US31995–2001