LexDanaLexDanabeta
Inventor

Yuhei Sumiyoshi

Inventor
Utsunomiya, JP

Overview

12→
Patents
2000–2020
Patent span
Physics
Primary field (CPC G)

Patents· 12 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
G02BOptical elements, systems or apparatus27%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them18%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
PatentTitleYear
10,545,413Evaluation method, exposure method, and method for manufacturing an article202010,191,394Distortion detection method, exposure apparatus, exposure method, and device manufacturing method20198,760,618'Projection optical system, exposure apparatus and device manufacturing method'20148,477,286'Projection optical system, exposure apparatus, and device manufacturing method'20138,437,004'Detection apparatus'20137,408,620'Exposure apparatus'20087,403,262'Projection optical system and exposure apparatus having the same'20087,365,826'Projection optical system, exposure apparatus and method using the same'20087,215,410'Exposure apparatus'20077,006,194'Projection optical system, exposure apparatus and method using the same'20066,256,086'Projection exposure apparatus, and device manufacturing method'20016,014,455'Projection exposure apparatus and device manufacturing method'2000

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2000–2020Patents assigned to CANON KK (12)· patent assignee history
2000–2020Based in Utsunomiya, JP· patent location history
2006–2008Based in Tochigi, JP· patent location history
2013–2014Patents assigned to SUMIYOSHI YUHEI (3)· patent assignee history
2013Patents assigned to TOKIMITSU TAKUMI (1)· patent assignee history
2013Patents assigned to YUUKI HIROYUKI (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
CANON KK122000–2020
SUMIYOSHI YUHEIself32013–2014
TOKIMITSU TAKUMI12013
YUUKI HIROYUKI12013
Locations
LocationPatentsSpan
Utsunomiya, JP82000–2020
Tochigi, JP42006–2008