Inventor
Tung-Ching Tseng
Inventor
Taipei, TW
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1026%
B24BMachines, devices, or processes for grinding or polishing13%
H01LSemiconductor devices13%
C23CCoating metallic material4%
G01FMeasuring volume, volume flow, mass flow or liquid level4%
G01NInvestigating or analysing materials by determining their chemical or physical properties4%
PatentTitleYear
10,121,698Method of manufacturing a semiconductor device20189,548,241'Semiconductor device metallization systems and methods'20179,318,364'Semiconductor device metallization systems and methods'20167,297,632'Scratch reduction for chemical mechanical polishing'20077,109,117'Method for chemical mechanical polishing of a shallow trench isolation structure'20067,016,790'In-line hot-wire sensor for slurry monitoring'20066,930,040'Method of forming a contact on a silicon-on-insulator wafer'20056,812,069'Method for improving semiconductor process wafer CMP uniformity while avoiding fracture'20046,686,284'Chemical mechanical polisher equipped with chilled retaining ring and method of using'20046,579,151'Retaining ring with active edge-profile control by piezoelectric actuator/sensors'20036,579,150'Dual detection method for end point in chemical mechanical polishing'20036,176,930'Apparatus and method for controlling a flow of process material to a deposition chamber'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001Patents assigned to APPLIED MATERIALS INC (1)· patent assignee history
2001Based in Sunnyvale, CA, US· patent location history
2003–2016Patents assigned to TAIWAN SEMICONDUCTOR MFG (9)· patent assignee history
2003Based in Shindian, TW· patent location history
2004–2018Based in Taipei, TW· patent location history
2004Based in Hai Dian District, CN· patent location history
2017–2018Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG | 9 | 2003–2016 |
| TAIWAN SEMICONDUCTOR MFG CO LTD | 2 | 2017–2018 |
| APPLIED MATERIALS INC | 1 | 2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| Taipei, TW | 8 | 2004–2018 |
| Shindian, TW | 2 | 2003 |
| Hai Dian District, CN | 1 | 2004 |
| Sunnyvale, California, US | 1 | 2001 |