Inventor
HIROKI SAKURAI
Inventor
JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01LSemiconductor devices22%
B08BCleaning in general13%
B05BSpraying apparatus11%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices9%
F26BDrying solid materials or objects by removing liquid therefrom7%
G05DSystems for controlling or regulating non-electric variables7%
B05CApparatus for applying fluent materials to surfaces, in general4%
C23FNon-mechanical removal of metallic material from surface2%
PatentTitleYear
12,588,461Substrate processing method and substrate processing apparatus202612,424,459Substrate processing apparatus and substrate processing method202512,400,882Substrate processing apparatus and substrate processing method202512,051,605Substrate processing apparatus202412,044,973Substrate processing apparatus and substrate processing method202412,027,394Substrate processing method and substrate processing apparatus202412,007,692Nozzle, substrate processing apparatus, and substrate processing method202411,955,352Substrate processing apparatus202411,862,474Substrate processing apparatus and substrate processing method202411,676,835Substrate processing method and substrate processing apparatus202311,437,251Substrate processing apparatus for producing mixed processing liquid2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to TOKYO ELECTRON LTD (11)· patent assignee history
2022Patents assigned to TOKYO ELECTRON LIMI TED (1)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 11 | 2022–2026 |
| TOKYO ELECTRON LIMI TED | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 11 | 2022–2026 |