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Inventor

Uwe Spengler

Inventor
Treuchtlingen, DE

Overview

3→
Patents
2013–2017
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary
G02BOptical elements, systems or apparatus50%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
PatentTitleYear
9,575,414'Illumination system for a microlithographic projection exposure apparatus'20179,217,930'Illumination system for a microlithographic projection exposure apparatus'20158,395,756'Illumination system for a microlithographic projection exposure apparatus'2013

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2013–2017Patents assigned to ZEISS CARL SMT GMBH (3)· patent assignee history
2013Patents assigned to DEGUENTHER MARKUS (1)· patent assignee history
2013Patents assigned to LAYH MICHAEL (1)· patent assignee history
2013Patents assigned to MAUL MANFRED (1)· patent assignee history
2013Patents assigned to SCHARNWEBER RALF (1)· patent assignee history
2013–2017Based in Treuchtlingen, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ZEISS CARL SMT GMBH32013–2017
DEGUENTHER MARKUS12013
LAYH MICHAEL12013
MAUL MANFRED12013
SCHARNWEBER RALF12013
Locations
LocationPatentsSpan
Treuchtlingen, DE32013–2017