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Inventor

Joerge Tschischgale

Inventor
Dresden, DE

Overview

2→
Patents
2010–2011
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Bprimary
G03BApparatus or arrangements for taking photographs or for projecting or viewing them50%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
PatentTitleYear
7,920,275'Optical system of a microlithographic projection exposure apparatus'20117,733,501'Optical system of a microlithographic projection exposure apparatus'2010

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2010Patents assigned to ZEISS CARL SMT AG (1)· patent assignee history
2010–2011Based in Dresden, DE· patent location history
2011Patents assigned to ZEISS CARL SMT GMBH (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ZEISS CARL SMT AG12010
ZEISS CARL SMT GMBH12011
Locations
LocationPatentsSpan
Dresden, DE22010–2011