Inventor

Shinjiroo Ueda

Inventor

Abiko, JP

Overview

10→

Patents

1988–1995

Patent span

Mechanical engineering

Primary field (CPC F)

Patents· 10 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

F04Dprimary

F04DNon-positive-displacement pumps25%

H05HPlasma technique19%

B01JChemical or physical processes, e.g. catalysis or colloid chemistry13%

C23CCoating metallic material13%

H01JElectric discharge tubes or discharge lamps13%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests13%

F25JLiquefaction, solidification or separation of gases or gaseous or liquefied gaseous mixtures by pressure and cold treatment or by bringing them into the supercritical state6%

PatentTitleYear

5,442,183'Charged particle beam apparatus including means for maintaining a vacuum seal'1995 5,254,856'Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems'1993 5,177,448'Synchrotron radiation source with beam stabilizers'1993 5,122,175'Method of and apparatus for producing superpure nitrogen'1992 5,062,771'Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber'1991 5,020,969'Turbo vacuum pump'1991 4,994,753'Synchrotron radiation source'1991 4,853,640'Synchrotron radiation source'1989 4,835,114'Method for LPCVD of semiconductors using oil free vacuum pumps'1989 4,732,530'Turbomolecular pump'1988

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1988–1995Patents assigned to HITACHI LTD (10)· patent assignee history

1988–1995Based in Abiko, JP· patent location history

1989–1991Patents assigned to HITACHI TOKYO ELECTRONICS (2)· patent assignee history

1989Patents assigned to HITACHI SERVICE ENGINEERING LT (1)· patent assignee history

1991–1993Patents assigned to HITACHI SERVICE ENG (2)· patent assignee history

1991–1993Patents assigned to NIPPON TELEGRAPH & TELEPHONE (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
HITACHI LTD	10	1988–1995
HITACHI SERVICE ENG	2	1991–1993
HITACHI TOKYO ELECTRONICS	2	1989–1991
NIPPON TELEGRAPH & TELEPHONE	2	1991–1993
HITACHI SERVICE ENGINEERING LT	1	1989

Locations

Location	Patents	Span
Abiko, JP	10	1988–1995