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Inventor

Toshifumi Tachikawa

Inventor
Miyagi, JP

Overview

5→
Patents
2016–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps56%
H05HPlasma technique33%
C23CCoating metallic material11%
PatentTitleYear
10,593,519Plasma processing apparatus202010,109,461Plasma processing method20189,754,768'Plasma processing method and plasma processing apparatus'20179,734,992'Plasma processing apparatus'20179,355,822'Plasma processing apparatus'2016

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2016–2020Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2016–2018Patents assigned to DAIHEN CORP (3)· patent assignee history
2016–2020Based in Miyagi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD52016–2020
DAIHEN CORP32016–2018
Locations
LocationPatentsSpan
Miyagi, JP52016–2020