Inventor
Toan Q. Tran
Inventor
San Jose, CA, US
Overview
Patents· 18 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H01JElectric discharge tubes or discharge lamps20%
C23CCoating metallic material16%
H01LSemiconductor devices11%
B05BSpraying apparatus5%
Y10TTechnical subjects covered by former us classification5%
F16KValves4%
H05HPlasma technique4%
B01FMixing, e.g. dissolving, emulsifying or dispersing2%
C25DProcesses for the electrolytic or electrophoretic production of coatings2%
PatentTitleYear
10,755,900Multi-layer plasma erosion protection for chamber components202010,559,451Apparatus with concentric pumping for multiple pressure regimes202010,550,472Flow control features of CVD chambers202010,504,700Plasma etching systems and methods with secondary plasma injection201910,468,285High temperature chuck for plasma processing systems201910,431,429Systems and methods for radial and azimuthal control of plasma uniformity201910,354,843Chemical control features in wafer process equipment201910,340,124Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide20199,978,564Chemical control features in wafer process equipment20189,728,437'High temperature chuck for plasma processing systems'20179,132,436'Chemical control features in wafer process equipment'20159,018,108'Low shrinkage dielectric films'20158,894,767'Flow control features of CVD chambers'20147,989,365'Remote plasma source seasoning'20117,841,582'Variable seal pressure slit valve doors for semiconductor manufacturing equipment'20107,806,383'Slit valve'20107,204,888'Lift pin assembly for substrate processing'20076,273,140'Cluster valve for semiconductor wafer processing systems'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2020Patents assigned to APPLIED MATERIALS INC (18)· patent assignee history
2001–2020Based in San Jose, CA, US· patent location history
2014Patents assigned to CHEN XINGLONG (1)· patent assignee history
2014Patents assigned to CHUC KIEN N (1)· patent assignee history
2014Patents assigned to KHAN ADIB (1)· patent assignee history
2014Patents assigned to LIANG QIWEI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 18 | 2001–2020 |
| CHEN XINGLONG | 1 | 2014 |
| CHUC KIEN N | 1 | 2014 |
| KHAN ADIB | 1 | 2014 |
| LIANG QIWEI | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 18 | 2001–2020 |