Inventor
Charles T. Carlson
Inventor
Cedar Park, TX, US
Overview
Patents· 23 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01LSemiconductor devices19%
H01JElectric discharge tubes or discharge lamps10%
Y10TTechnical subjects covered by former us classification7%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors6%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation6%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution5%
Y02PClimate change mitigation technologies in the production or processing of goods5%
C23CCoating metallic material4%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices2%
PatentTitleYear
10,854,483High pressure steam anneal processing apparatus202010,831,112Reticle processing system202010,643,867Annealing system and method202010,446,710Transfer chamber and method of using a transfer chamber201910,256,132Reticle processing system201910,217,657Active substrate alignment system and method20199,694,989'Workpiece handling system and methods of workpiece handling'20179,659,677'Shielding device for substrate edge protection and method of using same'20179,570,309'Mask alignment system for semiconductor processing'20179,490,153'Mechanical alignment of substrates to a mask'20169,437,392'High-throughput ion implanter'20169,412,638'End effector pads'20169,333,733'Multi-part mask for implanting workpieces'20169,240,338'Workpiece alignment device'20169,145,271'Optimization of conveyor belts used for workpiece processing'20159,082,799'System and method for 2D workpiece alignment'20159,004,564'Wafer handling apparatus'20158,813,338'Workpiece alignment device'20148,698,104'System and method for handling multiple workpieces for matrix configuration processing'20148,569,157'Stepped masking for patterned implantation'20138,330,128'Implant mask with moveable hinged mask segments'20128,173,527'Stepped masking for patterned implantation'20128,101,927'Masking apparatus for an ion implanter'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012–2016Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (11)· patent assignee history
2012–2014Patents assigned to CARLSON CHARLES T (6)· patent assignee history
2012–2014Patents assigned to WEAVER WILLIAM T (4)· patent assignee history
2012–2020Based in Cedar Park, TX, US· patent location history
2016–2020Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (10)· patent assignee history
2020Patents assigned to APPLIED MATERIALS INC (3)· patent assignee history
2020Based in Austin, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT | 11 | 2012–2016 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 10 | 2016–2020 |
| CARLSON CHARLES Tself | 6 | 2012–2014 |
| WEAVER WILLIAM T | 4 | 2012–2014 |
| APPLIED MATERIALS INC | 3 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Cedar Park, Texas, US | 22 | 2012–2020 |
| Austin, Texas, US | 1 | 2020 |