Inventor
Meng-Wei Chen
Inventor
Taichung, TW
Overview
Patents· 18 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices35%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01LSemiconductor devices17%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1015%
H10DInorganic electric semiconductor devices9%
G06FElectric digital data processing2%
PatentTitleYear
10,867,933Method for forming semiconductor device structure with overlay grating202010,734,325Method for forming semiconductor device structure with overlay grating202010,534,272Method of fabricating reticle202010,461,037Method for forming semiconductor device structure with overlay grating201910,146,141Lithography process and system with enhanced overlay quality201810,073,354Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool20189,773,671'Material composition and process for mitigating assist feature pattern transfer'20179,129,974'Enhanced FinFET process overlay mark'20158,850,369'Metal cut process flow'20148,840,796'Integrated circuit method with triple patterning'20148,822,343'Enhanced FinFET process overlay mark'20148,716,139'Method of patterning a semiconductor device'20148,562,843'Integrated circuit method with triple patterning'20138,455,982'Overlay mark enhancement feature'20138,237,297'System and method for providing alignment mark for high-k metal gate process'20128,203,836'Cover structure'20128,148,232'Overlay mark enhancement feature'20127,097,945'Method of reducing critical dimension bias of dense pattern and isolation pattern'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006Based in Changhua County, TW· patent location history
2012–2015Patents assigned to TAIWAN SEMICONDUCTOR MFG (9)· patent assignee history
2012–2014Patents assigned to CHEN MENG-WEI (6)· patent assignee history
2012–2014Patents assigned to CHEN KUEI SHUN (3)· patent assignee history
2012–2020Based in Taichung, TW· patent location history
2012Based in Taipei, TW· patent location history
2014Patents assigned to CHEN KUEI-SHUN (2)· patent assignee history
2017–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (7)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG | 9 | 2012–2015 |
| TAIWAN SEMICONDUCTOR MFG CO LTD | 7 | 2017–2020 |
| CHEN MENG-WEIself | 6 | 2012–2014 |
| CHEN KUEI SHUN | 3 | 2012–2014 |
| CHEN KUEI-SHUN | 2 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Taichung, TW | 16 | 2012–2020 |
| Taipei, TW | 1 | 2012 |
| Changhua County, TW | 1 | 2006 |