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Inventor

Shu-Fen Wu

Inventor
Yilan County, TW

Overview

4→
Patents
2014–2018
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling18%
H01LSemiconductor devices18%
H02NElectric machines not otherwise provided for18%
C23CCoating metallic material9%
PatentTitleYear
9,976,215Semiconductor film formation apparatus and process20189,287,154'UV curing system for semiconductors'20169,218,998'Electrostatic chuck with multi-zone control'20158,902,561'Electrostatic chuck with multi-zone control'2014

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2014–2016Patents assigned to CHEN CHIA-HO (2)· patent assignee history
2014–2016Patents assigned to CHOU YOU-HUA (2)· patent assignee history
2014–2016Patents assigned to LEE CHIH-TSUNG (2)· patent assignee history
2014–2016Patents assigned to LIEN MING HUEI (2)· patent assignee history
2014–2018Based in Yilan County, TW· patent location history
2015–2018Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (3)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD32015–2018
CHEN CHIA-HO22014–2016
CHOU YOU-HUA22014–2016
LEE CHIH-TSUNG22014–2016
LIEN MING HUEI22014–2016
Locations
LocationPatentsSpan
Yilan County, TW42014–2018