Inventor
TING-KUI CHANG
Inventor
TW
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1019%
H10DInorganic electric semiconductor devices13%
B08BCleaning in general6%
C09GPolishing compositions6%
B24BMachines, devices, or processes for grinding or polishing4%
C09KMaterials for miscellaneous applications, not provided for elsewhere2%
PatentTitleYear
12,543,553Forming liners to facilitate the formation of copper-containing vias in advanced technology nodes202612,444,646Devices with reduced capacitances202512,170,195Post-CMP cleaning and apparatus202412,068,195Metal loss prevention using implantation202412,046,506Devices with reduced capacitances202412,002,684Methods for chemical mechanical polishing and forming interconnect structure202411,728,157Post-CMP cleaning and apparatus202311,710,659Metal loss prevention using implantation202311,705,324Apparatus and method for wafer cleaning202311,658,065Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure202311,508,585Methods for chemical mechanical polishing and forming interconnect structure202211,322,345Post-CMP cleaning and apparatus202211,211,289Metal loss prevention using implantation2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (13)· patent assignee history
2021–2026Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 13 | 2021–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 13 | 2021–2026 |