Inventor
Shauh-Teh Juang
Inventor
Saratoga, CA, US
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices32%
G06FElectric digital data processing18%
G06TImage data processing or generation, in general14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
G05BControl or regulating systems in general9%
Y02PClimate change mitigation technologies in the production or processing of goods9%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
PatentTitleYear
11,120,182Methodology of incorporating wafer physical measurement with digital simulation for improving semiconductor device fabrication202110,754,309Auto defect screening using adaptive machine learning in semiconductor device manufacturing flow202010,365,617Auto defect screening using adaptive machine learning in semiconductor device manufacturing flow20199,547,745'System and method for discovering unknown problematic patterns in chip design layout for semiconductor manufacturing'20179,142,014'System and method for identifying systematic defects in wafer inspection using hierarchical grouping and filtering'20158,938,695'Signature analytics for improving lithographic process of manufacturing semiconductor devices'20158,539,388'Method and apparatus for low power semiconductor chip layout and low power semiconductor chip'20138,318,391'Process window signature patterns for lithography process control'20128,057,967'Process window signature patterns for lithography process control'20117,853,920'Method for detecting, sampling, analyzing, and correcting marginal patterns in integrated circuit manufacturing'20107,695,876'Method for identifying and using process window signature patterns for lithography process control'20106,748,103'Mechanisms for making and inspecting reticles'20046,654,489'Apparatus and methods for collecting global data during a reticle inspection'20036,529,621'Mechanisms for making and inspecting reticles'20036,516,085'Apparatus and methods for collecting global data during a reticle inspection'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2004Patents assigned to KLA TENCOR (3)· patent assignee history
2003–2021Based in Saratoga, CA, US· patent location history
2010–2012Patents assigned to ASML NETHERLANDS BV (3)· patent assignee history
2011–2013Patents assigned to JUANG SHAUH-TEH (3)· patent assignee history
2013Based in Jhubei City, TW· patent location history
2015–2019Patents assigned to DMO SYSTEMS LTD (4)· patent assignee history
2020–2021Patents assigned to APPLIED MATERIALS INC (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| DMO SYSTEMS LTD | 4 | 2015–2019 |
| ASML NETHERLANDS BV | 3 | 2010–2012 |
| JUANG SHAUH-TEHself | 3 | 2011–2013 |
| KLA TENCOR | 3 | 2003–2004 |
| APPLIED MATERIALS INC | 2 | 2020–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Saratoga, California, US | 14 | 2003–2021 |
| Jhubei City, TW | 1 | 2013 |