Inventor
TSUKASA KAMAKURA
Inventor
JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices31%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
C23CCoating metallic material28%
B08BCleaning in general6%
G05BControl or regulating systems in general3%
Y02PClimate change mitigation technologies in the production or processing of goods3%
PatentTitleYear
12,540,388Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium202612,249,503Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium202512,217,959Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium202512,053,805Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium202411,967,534Method of manufacturing semiconductor device202411,848,201Method of manufacturing semiconductor device, recording medium, and substrate processing method202311,810,781Method of processing substrate, substrate processing apparatus, recording medium, method of manufacturing semiconductor device202311,728,162Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium202311,726,456Substrate processing system202311,251,038Method of manufacturing semiconductor device, recording medium, and substrate processing method202211,251,039Method of manufacturing semiconductor device, recording medium, and substrate processing method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to KOKUSAI ELECTRIC CORP (11)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KOKUSAI ELECTRIC CORP | 11 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 11 | 2022–2026 |