Inventor
Chang-Sheng Lee
Inventor
Shin-Chu, TW
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H10DInorganic electric semiconductor devices15%
C23CCoating metallic material13%
B24BMachines, devices, or processes for grinding or polishing10%
H01JElectric discharge tubes or discharge lamps5%
C09GPolishing compositions3%
PatentTitleYear
10,748,806Apparatus and system for preventing backside peeling defects on semiconductor wafers202010,166,650Chemical-mechanical planarization system201910,163,676Apparatus and system for preventing backside peeling defects on semiconductor wafers201810,113,228Method for controlling semiconductor deposition operation20189,803,274'Process kit of physical vapor deposition chamber and fabricating method thereof'20179,611,546'Solid precursor delivery system'20179,553,160'Mechanisms for monitoring impurity in high-K dielectric film'20179,425,109'Planarization method, method for polishing wafer, and CMP system'20169,412,671'Method for controlling processing temperature in semiconductor fabrication'20169,384,949'Gas-flow control method for plasma apparatus'20169,362,385'Method for tuning threshold voltage of semiconductor device with metal gate structure'20169,343,315'Method for fabricating semiconductor structure, and solid precursor delivery system'20169,228,114'Composition and method for chemical mechanical polishing'20169,227,294'Apparatus and method for chemical mechanical polishing'20166,277,751'Method of planarization'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001Patents assigned to WORLDWIDE SEMICONDUCTOR MFG (1)· patent assignee history
2001Based in Taipei, TW· patent location history
2016–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (11)· patent assignee history
2016Patents assigned to TAIWAN SEMICONDUCTOR MFG (3)· patent assignee history
2016–2018Based in Shin-Chu, TW· patent location history
2016–2020Based in Hsinchu, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 11 | 2016–2020 |
| TAIWAN SEMICONDUCTOR MFG | 3 | 2016 |
| WORLDWIDE SEMICONDUCTOR MFG | 1 | 2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| Shin-Chu, TW | 8 | 2016–2018 |
| Hsinchu, TW | 6 | 2016–2020 |
| Taipei, TW | 1 | 2001 |