Inventor
AYUMI HIGUCHI
Inventor
JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices35%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%
B08BCleaning in general15%
C23CCoating metallic material5%
C23FNon-mechanical removal of metallic material from surface5%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
PatentTitleYear
11,919,051Substrate cleaning apparatus and substrate cleaning method202411,881,403Substrate processing method and substrate processing apparatus202411,413,662Substrate cleaning apparatus and substrate cleaning method202211,410,853Substrate processing method and substrate processing device202211,260,436Substrate processing apparatus and substrate processing method202211,217,461Substrate processing device202211,145,516Substrate processing method and substrate processing apparatus2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2024Patents assigned to SCREEN HOLDINGS CO LTD (7)· patent assignee history
2021–2024Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SCREEN HOLDINGS CO LTD | 7 | 2021–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 7 | 2021–2024 |