Inventor
ENLE CHOO
Inventor
US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material22%
C30BSingle-crystal growth19%
H01LSemiconductor devices16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light9%
G05DSystems for controlling or regulating non-electric variables6%
B01DSeparation3%
G01BMeasuring length, thickness or similar linear dimensions3%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
H05BElectric heating3%
PatentTitleYear
12,517,530Fast switching gas circuits and processing chambers, and related methods and apparatus, for gas stabilization202612,493,307Fast switching gas circuits and processing chambers, and related methods and apparatus, for gas stabilization202512,449,309Methods for detection using optical emission spectroscopy202512,385,159In-situ epi growth rate control of crystal thickness micro-balancing sensor202512,324,061Epitaxial deposition chamber202512,196,617Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber202512,165,934Substrate processing monitoring202411,848,202Growth monitor system and methods for film deposition202311,261,538In-situ temperature mapping for epi chamber2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 9 | 2022–2026 |