Inventor
Roger B. Fish
Inventor
Bedford, MA, US
Overview
Patents· 22 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01JElectric discharge tubes or discharge lamps14%
H01LSemiconductor devices12%
H10NElectric solid-state devices not otherwise provided for7%
F16LPipes5%
H01FMagnets5%
H02HEmergency protective circuit arrangements5%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
Y10TTechnical subjects covered by former us classification5%
PatentTitleYear
10,704,693Cryogenic ferrofluid sealed rotary union202010,541,137Method and apparatus for non line-of-sight doping202010,032,601Platen support structure20189,530,682'System and apparatus for holding a substrate over wide temperature range'20169,514,916'Wafer platen thermosyphon cooling system'20169,417,138'Gas coupled probe for substrate temperature measurement'20169,391,450'Technique for limiting transmission of fault current'20169,338,829'Heated platen with improved temperature uniformity'20169,212,949'Technique for temperature measurement and calibration of semiconductor workpieces using infrared'20159,163,772'Vacuum insulated cryogenic fluid transfer hose'20159,108,322'Force sensing system for substrate lifting apparatus'20158,998,269'Vacuum insulated fitting enclosure'20158,804,288'Technique for limiting transmission of fault current'20148,467,158'Technique for limiting transmission of fault current'20138,328,494'In vacuum optical wafer heater for cryogenic processing'20128,320,088'Power transfer mechanism for use in transmission and distribution level electrical power systems'20128,149,256'Techniques for changing temperature of a platen'20128,020,398'Fluid delivery mechanism for vacuum wafer processing system'20117,977,652'Optical heater for cryogenic ion implanter surface regeneration'20116,734,439'Wafer pedestal tilt mechanism and cooling system'20046,429,139'Serial wafer handling mechanism'20026,347,919'Wafer processing chamber having separable upper and lower halves'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002Patents assigned to EATON CORP (2)· patent assignee history
2002–2020Based in Bedford, MA, US· patent location history
2011–2016Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (13)· patent assignee history
2012–2015Patents assigned to FISH ROGER B (5)· patent assignee history
2015Patents assigned to SANTORELLA MICHAEL D (2)· patent assignee history
2016–2020Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (6)· patent assignee history
2016Based in Beford, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT | 13 | 2011–2016 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 6 | 2016–2020 |
| FISH ROGER Bself | 5 | 2012–2015 |
| EATON CORP | 2 | 2002 |
| SANTORELLA MICHAEL D | 2 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Bedford, Massachusetts, US | 21 | 2002–2020 |
| Beford, Massachusetts, US | 1 | 2016 |