Inventor
Ian Smith
Inventor
Los Gatos, CA, US
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices44%
G01NInvestigating or analysing materials by determining their chemical or physical properties38%
B60RVehicles, vehicle fittings, or vehicle parts, not otherwise provided for3%
G01BMeasuring length, thickness or similar linear dimensions3%
G01RMeasuring electric variables3%
H01JElectric discharge tubes or discharge lamps3%
H04LTransmission of digital information, e.g. telegraphic communication3%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h103%
PatentTitleYear
7,933,016'Apparatus and methods for detecting overlay errors using scatterometry'20117,876,440'Apparatus and methods for detecting overlay errors using scatterometry'20117,663,753'Apparatus and methods for detecting overlay errors using scatterometry'20107,659,126'Electrical test method and apparatus'20107,564,557'Apparatus and methods for detecting overlay errors using scatterometry'20097,433,040'Apparatus and methods for detecting overlay errors using scatterometry'20087,385,699'Apparatus and methods for detecting overlay errors using scatterometry'20087,379,183'Apparatus and methods for detecting overlay errors using scatterometry'20087,361,941'Calibration standards and methods'20087,317,531'Apparatus and methods for detecting overlay errors using scatterometry'20087,301,634'Apparatus and methods for detecting overlay errors using scatterometry'20077,298,481'Apparatus and methods for detecting overlay errors using scatterometry'20077,289,213'Apparatus and methods for detecting overlay errors using scatterometry'20077,280,212'Apparatus and methods for detecting overlay errors using scatterometry'20077,242,477'Apparatus and methods for detecting overlay errors using scatterometry'20076,710,876'Metrology system using optical phase'20045,974,351'Multiplexed electronic control systems'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999Patents assigned to JAGUAR CARS (1)· patent assignee history
1999Based in Conventry, GB· patent location history
2004–2011Patents assigned to KLA TENCOR TECH CORP (16)· patent assignee history
2004–2011Based in Los Gatos, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR TECH CORP | 16 | 2004–2011 |
| JAGUAR CARS | 1 | 1999 |
Locations
| Location | Patents | Span |
|---|---|---|
| Los Gatos, California, US | 16 | 2004–2011 |
| Conventry, GB | 1 | 1999 |