Inventor
TORU EDO
Inventor
JP
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices43%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
B08BCleaning in general14%
PatentTitleYear
12,176,215Substrate processing apparatus, substrate processing method, and non-transitory computer-readable storage medium202412,142,502Processing condition selection method, substrate processing method, substrate product production method, processing condition selecting device, computer program, and storage medium202411,764,055Substrate processing method and substrate processing device2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2024Patents assigned to SCREEN HOLDINGS CO LTD (3)· patent assignee history
2023–2024Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SCREEN HOLDINGS CO LTD | 3 | 2023–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 3 | 2023–2024 |