Inventor
Sumi Tanaka
Inventor
Nirasaki, JP
Overview
Patents· 22 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1039%
C23CCoating metallic material24%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
G01RMeasuring electric variables4%
H01JElectric discharge tubes or discharge lamps4%
B41JTypewriters2%
C30BSingle-crystal growth2%
H01LSemiconductor devices2%
H05BElectric heating2%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation2%
PatentTitleYear
11,072,167Data transfer apparatus, recording head, and data transfer method20219,224,623'Microwave irradiation apparatus'20158,440,939'Annealing device'20138,246,900'Annealing apparatus'20128,197,601'Vaporizer, vaporization module and film forming apparatus'20127,842,229'Substrate processing apparatus and substrate rotating device'20107,837,828'Substrate supporting structure for semiconductor processing, and plasma processing device'20107,769,279'Heat treatment apparatus'20107,618,494'Substrate holding structure and substrate processing device'20097,547,860'Microwave plasma processing apparatus for semiconductor element production'20097,250,094'Heat treatment apparatus'20076,733,593'Film forming device'20046,042,653'Susceptor for bearing an object to be processed thereon'20006,036,782'Shower head'20005,972,114'Film deposition apparatus with anti-adhesion film and chamber cooling means'19995,951,772'Vacuum processing apparatus'19995,647,945'Vacuum processing apparatus'19975,525,160'Film deposition processing device having transparent support and transfer pins'19965,332,442'Surface processing apparatus'1994D0340150'Auxiliary music stand for a piano'19934,950,982'Electric probing test machine'19904,901,011'Carrier for transferring plate-like objects one by one, a handling apparatus for loading or unloading the carrier, and a wafer probing machine fitted with the handling apparatus for the wafer carrier'1990Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1990–2015Patents assigned to TOKYO ELECTRON LTD (20)· patent assignee history
1990–2004Based in Kofu, JP· patent location history
1993–2015Patents assigned to TANAKA SUMI (5)· patent assignee history
1994–2009Based in Yamanashi, JP· patent location history
1999Based in Hatta-mura, JP· patent location history
2007–2015Based in Nirasaki, JP· patent location history
2012–2015Patents assigned to KASAI SHIGERU (3)· patent assignee history
2012–2013Patents assigned to MIYASHITA HIROYUKI (2)· patent assignee history
2012–2013Patents assigned to SUZUKI TOMOHIRO (2)· patent assignee history
2021Based in Kawasaki, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 20 | 1990–2015 |
| TANAKA SUMIself | 5 | 1993–2015 |
| KASAI SHIGERU | 3 | 2012–2015 |
| MIYASHITA HIROYUKI | 2 | 2012–2013 |
| SUZUKI TOMOHIRO | 2 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 9 | 2007–2015 |
| Yamanashi, JP | 7 | 1994–2009 |
| Kofu, JP | 3 | 1990–2004 |
| Kawasaki, JP | 1 | 2021 |
| Hatta-mura, JP | 1 | 1999 |