Inventor
Hiroki Matsumaru
Inventor
Nirasaki, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps44%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H02NElectric machines not otherwise provided for11%
Y10TTechnical subjects covered by former us classification11%
PatentTitleYear
8,142,609'Plasma processing apparatus'20127,922,862'Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method'20117,767,055'Capacitive coupling plasma processing apparatus'20107,585,386'Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2012Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2009–2011Patents assigned to OCTEC INC (2)· patent assignee history
2009–2011Based in Nirasaki, JP· patent location history
2012Patents assigned to KOMATSU KENJI (1)· patent assignee history
2012Patents assigned to MATSUMARU HIROKI (1)· patent assignee history
2012Patents assigned to NAKAO NOBUTAKA (1)· patent assignee history
2012Based in Sendai, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2009–2012 |
| OCTEC INC | 2 | 2009–2011 |
| KOMATSU KENJI | 1 | 2012 |
| MATSUMARU HIROKIself | 1 | 2012 |
| NAKAO NOBUTAKA | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 3 | 2009–2011 |
| Sendai, JP | 1 | 2012 |