Inventor
Fabrizio Evangelista
Inventor
Eindhoven, NL
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices53%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light5%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them5%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation5%
PatentTitleYear
10,620,544Fluid handling structure, lithographic apparatus and device manufacturing method202010,209,624Fluid handling structure, lithographic apparatus and device manufacturing method20199,846,372Fluid handling structure, lithographic apparatus and device manufacturing method20179,625,828'Fluid handling structure, lithographic apparatus and device manufacturing method'20179,470,985'Lithographic apparatus, sensor and method'20169,383,654'Fluid handling structure, lithographic apparatus and device manufacturing method'20169,256,136'Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply'20168,902,400'Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus'20148,614,784'Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply'20138,405,817'Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2020Patents assigned to ASML NETHERLANDS BV (10)· patent assignee history
2013–2017Patents assigned to EVANGELISTA FABRIZIO (6)· patent assignee history
2013–2017Patents assigned to RIEPEN MICHEL (6)· patent assignee history
2013–2017Patents assigned to CORTIE ROGIER HENDRIKUS MAGDALENA (4)· patent assignee history
2013–2016Patents assigned to KEMPER NICOLAAS RUDOLF (3)· patent assignee history
2013–2020Based in Eindhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 10 | 2013–2020 |
| EVANGELISTA FABRIZIOself | 6 | 2013–2017 |
| RIEPEN MICHEL | 6 | 2013–2017 |
| CORTIE ROGIER HENDRIKUS MAGDALENA | 4 | 2013–2017 |
| KEMPER NICOLAAS RUDOLF | 3 | 2013–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 10 | 2013–2020 |