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Inventor

Tetsuhiko Sanbei

Inventor
Narita, JP

Overview

2→
Patents
1995–1996
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1067%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests33%
PatentTitleYear
5,522,966'Dry etching process for semiconductor'19965,423,941'Dry etching process for semiconductor'1995

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1995–1996Patents assigned to NIPPON DENSO CO (2)· patent assignee history
1995–1996Based in Narita, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NIPPON DENSO CO21995–1996
Locations
LocationPatentsSpan
Narita, JP21995–1996