Inventor
Satoru Toyoda
Inventor
Shizuoka, JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material35%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1022%
B01DSeparation4%
H01JElectric discharge tubes or discharge lamps4%
H01LSemiconductor devices4%
H10DInorganic electric semiconductor devices4%
PatentTitleYear
9,005,413'Film formation apparatus'20158,809,193'Method for the formation of Co film and method for the formation of Cu interconnection film'20148,796,142'Method for forming tantalum nitride film'20148,158,197'Method for forming tantalum nitride film'20128,158,198'Method for forming tantalum nitride film'20128,105,468'Method for forming tantalum nitride film'20126,280,585'Sputtering apparatus for filling pores of a circular substrate'20014,816,046'Fine particle collector trap for vacuum evacuating system'1989Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1989–2001Based in Chigasaki, JP· patent location history
2001–2015Patents assigned to ULVAC INC (7)· patent assignee history
2012–2015Patents assigned to TOYODA SATORU (6)· patent assignee history
2012–2014Patents assigned to USHIKAWA HARUNORI (5)· patent assignee history
2012–2014Patents assigned to GONOHE NARISHI (4)· patent assignee history
2012–2014Patents assigned to KONDO TOMOYASU (4)· patent assignee history
2012–2014Based in Shizuoka, JP· patent location history
2014Based in Sizuoka, JP· patent location history
2015Based in Susono, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ULVAC INC | 7 | 2001–2015 |
| TOYODA SATORUself | 6 | 2012–2015 |
| USHIKAWA HARUNORI | 5 | 2012–2014 |
| GONOHE NARISHI | 4 | 2012–2014 |
| KONDO TOMOYASU | 4 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Shizuoka, JP | 4 | 2012–2014 |
| Chigasaki, JP | 2 | 1989–2001 |
| Susono, JP | 1 | 2015 |
| Sizuoka, JP | 1 | 2014 |