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Inventor

Michael Pharand

Inventor
Chelmsford, MA, US

Overview

1→
Patents
2010
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H02Nprimary
H02NElectric machines not otherwise provided for50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
7,714,406'Low-cost electrostatic clamp with fast de-clamp time'2010

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2010Patents assigned to AXCELIS TECH INC (1)· patent assignee history
2010Based in Chelmsford, MA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
AXCELIS TECH INC12010
Locations
LocationPatentsSpan
Chelmsford, Massachusetts, US12010