Inventor
Anisul Khan
Inventor
Santa Clara, CA, US
Overview
Patents· 32 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
H01JElectric discharge tubes or discharge lamps13%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems7%
B81BMicrostructural devices or systems, e.g. micromechanical devices6%
H01LSemiconductor devices6%
H10BElectronic memory devices6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
C23CCoating metallic material3%
C23FNon-mechanical removal of metallic material from surface3%
H10DInorganic electric semiconductor devices3%
PatentTitleYear
10,947,621Low vapor pressure chemical delivery20219,305,748'Method of matching two or more plasma reactors'20169,236,255'Methods for forming three dimensional NAND structures atop a substrate'20169,184,021'Predictive method of matching two plasma reactors'20158,956,500'Methods to eliminate “M-shape†etch rate profile in inductively coupled plasma reactor'20158,937,021'Methods for forming three dimensional NAND structures atop a substrate'20158,932,947'Methods for forming a round bottom silicon trench recess for semiconductor applications'20158,747,684'Multi-film stack etching with polymer passivation of an overlying etched layer'20148,596,336'Substrate support temperature control'20138,231,736'Wet clean process for recovery of anodized chamber parts'20128,133,817'Shallow trench isolation etch process'20126,979,652'Etching multi-shaped openings in silicon'20056,954,561'Methods for forming thermo-optic switches, routers and attenuators'20056,905,616'Method of releasing devices from a substrate'20056,897,155'Method for etching high-aspect-ratio features'20056,827,869'Method of micromachining a multi-part cavity'20046,802,933'Apparatus for performing self cleaning method of forming deep trenches in silicon substrates'20046,759,340'Method of etching a trench in a silicon-on-insulator (SOI) structure'20046,696,365'Process for in-situ etching a hardmask stack'20046,642,127'Method for dicing a semiconductor wafer'20036,642,151'Techniques for plasma etching silicon-germanium'20036,593,244'Process for etching conductors at high etch rates'20036,583,063'Plasma etching of silicon using fluorinated gas mixtures'20036,518,192'Two etchant etch method'20036,491,835'Metal mask etching of silicon'20026,471,833'High etch rate method for plasma etching silicon nitride'20026,391,788'Two etchant etch method'20026,380,095'Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion'20026,372,655'Two etchant etch method'20026,318,384'Self cleaning method of forming deep trenches in silicon substrates'20016,303,513'Method for controlling a profile of a structure formed on a substrate'20016,270,634'Method for plasma etching at a high etch rate'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2021Patents assigned to APPLIED MATERIALS INC (29)· patent assignee history
2001–2005Based in Sunnyvale, CA, US· patent location history
2003–2016Based in Santa Clara, CA, US· patent location history
2012–2015Patents assigned to KHAN ANISUL (3)· patent assignee history
2012–2015Patents assigned to DESHMUKH SHASHANK (2)· patent assignee history
2012–2014Patents assigned to SRINIVASAN SUNIL (2)· patent assignee history
2013–2015Patents assigned to KHAN ANISUL H (3)· patent assignee history
2021Based in Cupertino, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 29 | 2001–2021 |
| KHAN ANISULself | 3 | 2012–2015 |
| KHAN ANISUL Hself | 3 | 2013–2015 |
| DESHMUKH SHASHANK | 2 | 2012–2015 |
| SRINIVASAN SUNIL | 2 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 16 | 2003–2016 |
| Sunnyvale, California, US | 15 | 2001–2005 |
| Cupertino, California, US | 1 | 2021 |