Inventor
Marc Jurian Kea
Inventor
Den Dungen, NL
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices80%
G01NInvestigating or analysing materials by determining their chemical or physical properties20%
PatentTitleYear
10,578,980Method of determining a position of a feature20209,958,790Inspection methods, substrates having metrology targets, lithographic system and device manufacturing method20189,715,181'Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product'20179,507,279'Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2020Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2016–2017Based in Den Dungen, NL· patent location history
2018Based in Veldhoven, NL· patent location history
2020Based in Morgan Hill, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 4 | 2016–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Den Dungen, NL | 2 | 2016–2017 |
| Morgan Hill, California, US | 1 | 2020 |
| Veldhoven, NL | 1 | 2018 |