Inventor
Hyo Seok Yang
Inventor
Cupertino, CA, US
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material27%
H01JElectric discharge tubes or discharge lamps18%
H01LSemiconductor devices18%
H05HPlasma technique18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
PatentTitleYear
9,558,963'Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation'20179,177,788'Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation'20159,145,608'Scanning injector assembly module for processing substrate'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2017Patents assigned to VEECO ALD INC (3)· patent assignee history
2015Patents assigned to SYNOS TECHNOLOGY INC (2)· patent assignee history
2015–2017Based in Cupertino, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VEECO ALD INC | 3 | 2015–2017 |
| SYNOS TECHNOLOGY INC | 2 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Cupertino, California, US | 3 | 2015–2017 |