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Inventor

Kouji Takahata

Inventor
Kawasaki, JP

Overview

1→
Patents
1996
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps100%
PatentTitleYear
5,561,299'X-Y stage and charged particle beam exposure apparatus'1996

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1996Patents assigned to FUJITSU LTD (1)· patent assignee history
1996Based in Kawasaki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
FUJITSU LTD11996
Locations
LocationPatentsSpan
Kawasaki, JP11996