Inventor
Jeng-Yann Tsay
Inventor
Tainan, TW
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material7%
G01HMeasurement of mechanical vibrations or ultrasonic, sonic or infrasonic waves7%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light7%
G01NInvestigating or analysing materials by determining their chemical or physical properties7%
G01SRadio direction-finding7%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
G05DSystems for controlling or regulating non-electric variables7%
H01JElectric discharge tubes or discharge lamps7%
H01LSemiconductor devices7%
PatentTitleYear
10,624,196Laser source device and extreme ultraviolet lithography device20209,970,105Method for sealing processing module20188,149,562'System for decharging a wafer or substrate after dechucking from an electrostatic chuck'20127,354,555'Gas flow control system with interlock'20086,708,565'Ultrasonic wafer blade vibration detecting'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2012Patents assigned to TAIWAN SEMICONDUCTOR MFG (3)· patent assignee history
2004–2020Based in Tainan, TW· patent location history
2012Patents assigned to HSU YEN-HSIANG (1)· patent assignee history
2012Patents assigned to TSAY JENG-YANN (1)· patent assignee history
2018–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG | 3 | 2004–2012 |
| TAIWAN SEMICONDUCTOR MFG CO LTD | 2 | 2018–2020 |
| HSU YEN-HSIANG | 1 | 2012 |
| TSAY JENG-YANNself | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tainan, TW | 5 | 2004–2020 |