Inventor
TOKUNOBU AKAO
Inventor
JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Kprimary
G01KMeasuring temperature31%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
H01LSemiconductor devices23%
LOC1015%
PatentTitleYear
12,504,332Substrate temperature sensor, substrate retainer and substrate processing apparatus202512,050,138Substrate processing apparatus, and thermocouple202411,906,367Substrate temperature sensor, substrate retainer and substrate processing apparatus2024D0976129Temperature sensor2023D0973520Temperature sensor202211,300,456Substrate processing apparatus, and thermocouple2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to KOKUSAI ELECTRIC CORP (6)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KOKUSAI ELECTRIC CORP | 6 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 6 | 2022–2025 |